Octagonal Washer De Squids and Integrated Susceptometers Fabricated in a Planarized Sub-^Im Nb - A10X - Nb Technology

Abstract

We have designed, fabricated and measured a number of Nb - A10x - Nb octagonal washer dc SQUIDs and miniature dc SQUID susceptometers having minimum feature size down to 0.5 μm. With SQUID inductance values on the order of 100 pH typical noise performance is better than 1 [formula omitted]. The small minimum feature size of input coils and pickup loop structures will facilitate tight coupling to a wide variety of systems ranging from sub-nm particles and structures to conventional -|J.H input circuits. © 1993 IEEE