J.M. Jasinski, E.A. Whittaker, et al.
Applied Physics Letters
The techniques of optical emission spectroscopy with actinome-try, laser induced fluorescence spectroscopy, laser optogalvanic spectroscopy and absorption spectroscopy are discussed. Examples of the application of these techniques to probing low pressure plasmas of the type used in microelectronics materials processing are presented. © 1985 IUPAC
J.M. Jasinski, E.A. Whittaker, et al.
Applied Physics Letters
R.E. Walkup, D.M. Newns, et al.
Journal of Electron Spectroscopy and Related Phenomena
R. Srinivasan, Bodil Braren, et al.
Journal of the Optical Society of America B: Optical Physics
Ph. Avouris, F. Bozso, et al.
Nuclear Inst. and Methods in Physics Research, B