Optical diagnostics of low pressure plasmas
- R.W. Dreyfus
- J.M. Jasinski
- et al.
- 2009
- Pure and Applied Chemistry
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25 results for G.S. Selwyn
Across wafer etch rate uniformity in a high density plasma reactor: Experiment and modeling
- M. Surendra
- C.R. Guarnieri
- et al.
- 1995
- Applied Physics Letters
Optical characterization of particle traps
- G.S. Selwyn
- 1994
- Plasma Sources Science and Technology
Detection and modelling of electrode topography effects on particle traps
- M. Dalvie
- M. Surendra
- et al.
- 1994
- Plasma Sources Science and Technology
The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges
- P.J. Hargis Jr.
- K.E. Greenberg
- et al.
- 1994
- Review of Scientific Instruments
Self-consistent fluid modeling of radio frequency discharges in two dimensions
- M. Dalvie
- M. Surendra
- et al.
- 1993
- Applied Physics Letters
Detection of particle traps by spatially resolved optical emission spectroscopy over grooved electrodes in radio frequency discharges
- M. Dalvie
- G.S. Selwyn
- et al.
- 1993
- Applied Physics Letters
Particle Elimination by Design Intervention
- G.S. Selwyn
- 1993
- ISSM 1993
Phenomenological study of particulates in plasma tools and processes
- G.S. Selwyn
- 1993
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
A phenomenlogical study of particulates in plasma tools and processes
- Gary S. Selwyn
- 1993
- Japanese Journal of Applied Physics