Conference paper
WELL COUPLED dc SQUID WITH EXTREMELY LOW 1/F NOISE.
C.D. Tesche, K.H. Brown, et al.
International Conference on Low Temperature Physics (LT) 1983
The addition of a small concentration of suitably chosen noble gas to a reactive plasma is shown to permit the determination of the functional dependence of reactive particle density on plasma parameters. Examples illustrating the simplicity of this method are presented using F atomic emission from plasma-etching discharges and a comparison is made to available data in the literature.
C.D. Tesche, K.H. Brown, et al.
International Conference on Low Temperature Physics (LT) 1983
E.-A. Knabbe, J.W. Coburn, et al.
Surface Science
J.W. Coburn, H.F. Winters, et al.
Journal of Applied Physics
J.W. Coburn, Eric Kay
Journal of Applied Physics