Orientation Dependence of Built-in Surface Charge on Thermally Oxidized Silicon

A.E. Brennemann, L.V. Gregor

JES

P. Balk, J.M. Eldridge

Proceedings of the IEEE

P. Balk, E.L. Peterson

JES

J.M. Eldridge, R.B. Laibowitz, et al.

Journal of Applied Physics