G.M. Gallatin, F.A. Houle, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Photochemical generation and deposition of copper from a gas phase precursor
Abstract
The photochemical generation and deposition of copper metal from a volatile copper coordination complex are described. Pulsed and cw ultraviolet light sources were used to induce deposition. The chemical compositions of the films are compared for all methods.
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