Conference paper
Kinetics of chemically amplified resists
G.M. Wallraff, W.D. Hinsberg, et al.
Microlithography 1995
G.M. Wallraff, W.D. Hinsberg, et al.
Microlithography 1995
F.A. Houle
JVSTA
F.A. Houle, G.M. Poliskie, et al.
Microlithography 2000
E.E. Marinero, T.H. Baum, et al.
CLEO 1984