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J. Photopolym. Sci. Tech.
Energy distributions at hν =21.2 eV show the energy levels and level widths of sorbed gases (H2, N2, CO, CO2 and O2) on Ti. CO and CO2 appear to dissociate into Ti/0 + Ti/C upon adsorption. Exposure to {greater-than or approximate} 10-4Torr sec of H2 and O2 results in the formation of Ti compounds on the surface. © 1972.
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
Ming L. Yu
Physical Review B
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010