Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures