Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
Heated probes are used to modify the surface of polymeric thin films by thermomechanical indentation and local evaporation of material. The resolution of the processes is discussed for probestorage and surface patterning- applications. As storage densities exceed 1 Tbit/in 2, the depth of the indents becomes comparable to the natural surface roughness of the polymer. By templating an atomically flat surface this limitation can be overcome, enabling storage densities of up to 4 Tbit/in 2, corresponding to an indentation half-pitch of 7.5 nm. © 2010 American Scientific Publishers.
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films