Fabrication of nano-scale Cu bond pads with seal design in 3D integration applications
- K.N. Chen
- Cornelia Tsang
- et al.
- 2011
- Journal of Nanoscience and Nanotechnology
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.