David B. Mitzi
Journal of Materials Chemistry
A new high resolution profilometer has been demonstrated based upon a non-contacting near field thermal probe. The scanned thermal probe provides a direct measurement of surface profile without dependence upon material properties. Non-contact profiling of resist and metal films have shown a lateral resolution of approximately 100 nanometers and a depth resolution below 10 nanometers. The basic theory of the new probe will be described and the results presented. © 1986.
David B. Mitzi
Journal of Materials Chemistry
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Lawrence Suchow, Norman R. Stemple
JES