John G. Long, Peter C. Searson, et al.
JES
A new high resolution profilometer has been demonstrated based upon a non-contacting near field thermal probe. The scanned thermal probe provides a direct measurement of surface profile without dependence upon material properties. Non-contact profiling of resist and metal films have shown a lateral resolution of approximately 100 nanometers and a depth resolution below 10 nanometers. The basic theory of the new probe will be described and the results presented. © 1986.
John G. Long, Peter C. Searson, et al.
JES
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Sung Ho Kim, Oun-Ho Park, et al.
Small
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering