William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Knowledge of the contact stress state in layered media is important for quantitative understanding of the mechanical reliability of the media. The two-dimensional quasi-static stress analysis of a layer on an elastic half-space under combined normal and sliding cylindrical contact is studied. Results are presented for the stresses in both the layer and half-space and contrasted with the case of a homogeneous medium. © 1987.