John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
Knowledge of the contact stress state in layered media is important for quantitative understanding of the mechanical reliability of the media. The two-dimensional quasi-static stress analysis of a layer on an elastic half-space under combined normal and sliding cylindrical contact is studied. Results are presented for the stresses in both the layer and half-space and contrasted with the case of a homogeneous medium. © 1987.
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
Hannaneh Hajishirzi, Julia Hockenmaier, et al.
UAI 2011
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BACUS Symposium on Photomask Technology and Management 1991
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Proceedings of SPIE - The International Society for Optical Engineering