Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
A technique for collecting spatially resolved optical emission from large rf plasma reactors is described. To demonstrate the sensitivity and versatility of this technique, emission within the quartz ultraviolet, 225-253 nm, was studied with particular emphasis on the "plasma dark space." Spatial variations of CF2, AlF, and C atom emission were monitored. These results have been used for discussion and evaluation of various plasma excitation and reaction mechanisms involving atomic carbon in fluorocarbon plasmas. © 1985 Plenum Publishing Corporation.
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
J. Tersoff
Applied Surface Science
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials
A. Gangulee, F.M. D'Heurle
Thin Solid Films