Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
The assumption of “perfect flexibility" is shown to be self-consistent in an important class of finite-width foil bearing problems. When the membrane equations are written in the “stretched coordinates" of foil bearing theory, the usual edge conditions on the tape result in a statically determinate problem. The tape dynamics couples to the Reynolds lubrication equation through a single force-balance equation which does not entail the elastic strain. © 1974 by ASME.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
R. Ghez, J.S. Lew
Journal of Crystal Growth
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Physics of Fluids
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting