Conal E. Murray, S. Polvino, et al.
Powder Diffraction
Lattice spacing measurements of the (211)/(202), (020)/(013), and (111)/(102) reflections were used to calculate the residual stresses in a Ni monosilicide film after cooling from its formation temperature. The ability to measure stresses in crystalline materials using x-ray diffraction requires the use of appropriate x-ray elastic constants, which link the measured strain to the stress tensor of the grains that satisfy the diffraction condition. X-ray elastic constants were calculated in the Neerfeld-Hill (NH) limit for a polycrystalline aggregate composed of orthorhombic crystals. The anisotropy in grains that possess orthorhombic elasticity introduces significant variation in the stresses determined among the three sets of reflections. However, the in-plane stress calculated due to thermal expansion mismatch between NiSi and the underlying Si substrate shows a close correspondence to the average of x-ray measurements. © 2009 American Institute of Physics.
Conal E. Murray, S. Polvino, et al.
Powder Diffraction
Conal E. Murray
Applied Physics Letters
Conal E. Murray
Journal of Applied Physics
Marwan H. Khater, Zhen Zhang, et al.
IEEE Electron Device Letters