Summary abstract: Theory of thin-film orientation by ion bombardment during deposition

R.M. Macfarlane, R.L. Cone

Physical Review B - CMMP

Joy Y. Cheng, Daniel P. Sanders, et al.

SPIE Advanced Lithography 2008

Fernando Marianno, Wang Zhou, et al.

INFORMS 2021

Revanth Kodoru, Atanu Saha, et al.

arXiv