Investigations of silicon nano-crystal floating gate memories
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
The chemical nature of the adhesive interface between Cr and three polymers has been investigated using synchrotron-radiation excited photoemission from the polymer carbon is core levels. PMDA—ODA polyimide (PI), an important polymer in the electronics industry, was studied along with two simple polymers, PMPO and PVMK, which contain structural fragments of the complicated P1 protorner. The carbon Is spectra were decomposed into distinct peaks which were assigned to specific chemical species and monitored as a function of Cr coverage. Our results confirm that the carbonyl groups on these polymer surfaces are targets for reactive metals during the initial stages of metallization. This initial reaction stage was followed by gradual formation of an electron-rich, carbidelike, carbon species. © 1986, American Vacuum Society. All rights reserved.
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Lawrence Suchow, Norman R. Stemple
JES
Robert W. Keyes
Physical Review B