Conference paper
A 2-layer resist system derived from trimethylsilylstyrene
S.A. Macdonald, R.D. Allen, et al.
Proceedings of SPIE 1989
No abstract available.
S.A. Macdonald, R.D. Allen, et al.
Proceedings of SPIE 1989
Scott A. MacDonald, C.B. Larson, et al.
Microlithography 1993
G.A. Corker, B. Grant, et al.
JES
R.J. Cox, J. Kumamoto
Journal of Organic Chemistry