Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
A unimolecular templating star-shaped polymer with a compatibilizing outer corona, prepared by tandem ROP/ATRP procedures, was dispersed into a thermosetting organosilicate. The organic polymer was thermalized to leave behind its latent image in the matrix with a pore size that reflected the size of the polymer molecule, and provided the expected reduction in dielectric constant.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Mark W. Dowley
Solid State Communications
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films