Conference paper
Investigations of silicon nano-crystal floating gate memories
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
A unimolecular templating star-shaped polymer with a compatibilizing outer corona, prepared by tandem ROP/ATRP procedures, was dispersed into a thermosetting organosilicate. The organic polymer was thermalized to leave behind its latent image in the matrix with a pore size that reflected the size of the polymer molecule, and provided the expected reduction in dielectric constant.
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
R. Ghez, J.S. Lew
Journal of Crystal Growth
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures