Bahman Hekmatshoar
Electronics Letters
Heterojunction field-effect transistor devices with thin-film crystalline silicon channels and gate, source, and drain contacts formed by plasma-enhanced chemical vapor deposition (PECVD) at temperatures have been demonstrated. The gate and source/drain contacts are comprised of hydrogenated amorphous silicon and crystalline silicon, respectively; both grown in the same PECVD reactor. An ON/OFF ratio of ${>}{10}6, pinch-off voltage of approximately. © 2013 IEEE.
Bahman Hekmatshoar
Electronics Letters
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