Gian-Luca Bona, Peter Unger, et al.
IEEE Photonics Technology Letters
The vapor pressures of the metal organic halogen compounds diethylgallium chloride (DEGaCI) and diethylaluminum chloride (DEAICI) have been measured by a capacitance manometer in the temperature range 5 < θ < 60 °C. The measurements for DEAICI correlate and extrapolate well to existing data in the literature. The measurements for DEGaCI replace the previous data point measured at 60 °C. The dependences of the vapor pressures of DEAICI and DEGaCI on temperature are log (PDEAICI/Torr) = 8.780 - 2815(K/T) and log (PDEGaCI/Torr) = 8.943 - 3080(K/T), respectively. The results of mass transport measurements, combined with the measured compound vapor pressures, indicate that the vapor phase of these compounds is likely to be dominated by dimers. © 1991, American Chemical Society. All rights reserved.
Gian-Luca Bona, Peter Unger, et al.
IEEE Photonics Technology Letters
Nicholas I. Buchan, Ming L. Yu
Surface Science
W.Ted Masselink, Thomas F. Kuech
Journal of Electronic Materials
Ming L. Yu, Ulrich Memmert, et al.
Applied Physics Letters