1 µm MOSFET VLSI Technology: Part VI― Electron-Beam Lithography
- Warren D. Grobman
- Hans E. Luhn
- et al.
- 1979
- IEEE JSSC
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9 results for Albert J. Speth
Polymeric optical waveguides
- J.M. Hagerhorst-Trewhella
- J. Gelorme
- et al.
- 1989
- Proceedings of SPIE 1989
Laser direct writing of waveguide structures in LiNbO3.
- T. Krauss
- M.M. Oprysko
- et al.
- 1987
- CLEO 1987
Electron beam fabrication and characterization of fresnel zone plates for soft x-ray microscopy
- D. Kern
- P. Coane
- et al.
- 1989
- Proceedings of SPIE 1989
Effects of low-energy electron irradiation on Si-insulated gate fets
- A.J. Speth
- F. Fang
- 2004
- Applied Physics Letters
Laser microfabrication of optical circuits in LiNbO3
- T. Krauss
- A.J. Speth
- et al.
- 1988
- Applied Physics Letters
A new method for determining electron beam proximity correction parameters in a double layer siloxane-diazo resist system
- Fletcher Jones
- Jurij Paraszczak
- et al.
- 1984
- Journal of Applied Physics
1 μm MOSFET VLSI Technology: Part VI—Electron-Beam Lithography
- Warren D. Grobman
- Hans E. Luhn
- et al.
- 1979
- IEEE T-ED
Electron Beam Recording of Digital Information
- R.F.M. Thornley
- A.V. Brown
- et al.
- 1964
- IEEE Transactions on Electronic Computers