Ion beam annealing of semiconductors
- R.T. Hodgson
- J.E.E. Baglin
- et al.
- 2008
- Applied Physics Letters
Publications
Date
Featured collections
Popular topics
6 results for J.M. Neri
Test for nonthermal transient annealing in silicon
- J.E.E. Baglin
- R.T. Hodgson
- et al.
- 1983
- Applied Physics Letters
Epitaxial NiSi2 formation by pulsed ion beam annealing
- L.J. Chen
- L.S. Hung
- et al.
- 1982
- Applied Physics Letters
Pulsed ion beam irradiation of silicon
- W.K. Chu
- S. Mader
- et al.
- 1982
- Nuclear Instruments and Methods
Pulsed proton beam annealing: Semiconductors and silicides
- J.E.E. Baglin
- R.T. Hodgson
- et al.
- 1981
- Nuclear Instruments and Methods
An intense pulsed barium ion source
- J.M. Neri
- D.A. Hammer
- et al.
- 1981
- IEEE TNS