Cross-sectional transmission electron microscopy investigation of Ti/Si reaction on phosphorus-doped polycrystalline silicon gate
- C.Y. Wong
- F.S. Lai
- et al.
- 1986
- Journal of Applied Physics
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34 results for C.-Y. Ting
Effects of deposition methods on the temperature-dependent resistivity of tunasten films
- L. Krusin-Elbaum
- K.Y. Ahn
- et al.
- 1986
- JVSTA
Properties of reactively sputtered tungsten films in nitrogen and oxygen
- K.Y. Ahn
- S.B. Brodskv
- et al.
- 1986
- JVSTA
Thermal stability of TiSi2 on mono- and polycrystalline silicon
- C.Y. Wong
- L.K. Wang
- et al.
- 1986
- Journal of Applied Physics
USE OF TiSi//2 FOR SELF ALIGNED SILICIDE (SALICIDE) TECHNOLOGY.
- C.-Y. Ting
- Subramanian S. Iyer
- 1984
- VMIC 1984
MICROSTRUCTURE STUDIES OF Al-Cu SUBMICRON INTERCONNECTION.
- T. Kwok
- C.-Y. Ting
- et al.
- 1984
- VMIC 1984
A Self-Aligned 1-μm-Channel CMOS Technology with Retrograde n-Well and Thin Epitaxy
- Yuan Taur
- Genda J. Hu
- et al.
- 1985
- IEEE T-ED
A Self-Aligned 1-μm-Channel CMOS Technology with Retrograde n-Well and Thin Epitaxy
- Yuan Taur
- Genda J. Hu
- et al.
- 1985
- IEEE Journal of Solid-State Circuits
HIGH TEMPERATURE PROCESS LIMITATIONS ON TiSi//2.
- C.-Y. Ting
- F.M. d'Heurle
- et al.
- 1984
- ECS Meeting 1984
INTERACTION BETWEEN Ti AND SiO//2.
- C.-Y. Ting
- M. Wittmer
- et al.
- 1983
- ECS Meeting 1983