Chemical amplification resists: Inception, implementation in device manufacture, and new developments
- Hiroshi Ito
- 2003
- J Polym Sci Part A
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127 results for Hiroshi Ito
Impact of thin resist processes on post-etch LER
- Arpan P. Mahorowala
- Dario L. Goldfarb
- et al.
- 2003
- Microlithography 2003
Hydrogen bonding and aqueous base dissolution behavior of hexafluoroisopropanol-bearing polymers
- Hiroshi Ito
- William D. Hinsberg
- et al.
- 2003
- Microlithography 2003
Rational design in cyclic olefin resists for sub-100nm lithography
- Wenjie Li
- P. Rao Varanasi
- et al.
- 2003
- Microlithography 2003
Fluoropolymer resists: Progress and properties
- Hiroshi Ito
- H.D. Truong
- et al.
- 2003
- J. Photopolym. Sci. Tech.
Product volatilization as a probe of the physics and chemistry of latent image formation in chemically amplified resists
- W.D. Hinsberg
- F.A. Houle
- et al.
- 2002
- Journal of Physical Chemistry A
Radical Reactivity and Q-e Values of Methyl α-(Trifluoromethy 1)acrylate
- Hiroshi Ito
- Bernd Giese
- et al.
- 2002
- Macromolecules
Reactivity and Polymerization of Isopropenyl tert-Butyl Ketone: A Twisted α,β-Unsaturated Enone
- Hiroshi Ito
- Scott A. MacDonald
- et al.
- 2002
- Macromolecules
Synthesis of Poly(p-hydroxy-α-methylstyrene) by Cationic Polymerization and Chemical Modification
- Hiroshi Ito
- C. Grant Willson
- et al.
- 2002
- Macromolecules
Poly[p-(formyloxy)styrene]: Synthesis and Radiation-Induced Decarbonylation
- Jean M.J. Frechet
- Theodore G. Tessier
- et al.
- 2002
- Macromolecules