Paramagnetic nitrogen defects in silicon nitride
- W.L. Warren
- Jerzy Kanicki
- et al.
- 1992
- MRS Proceedings 1992
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13 results for W.L. Warren
Nitrogen dangling bonds in hydrogenated amorphous silicon nitride thin films
- Jerzy Kanicki
- W.L. Warren
- et al.
- 1992
- SSDM 1992
Paramagnetic Point Defects in Amorphous Silicon Dioxide and Amorphous Silicon Nitride Thin Films: II. a-SiNx:H
- F.C. Rong
- E.H. Poindexter
- 2019
- JES
Defects in amorphous hydrogenated silicon nitride films
- Jerzy Kanicki
- W.L. Warren
- 1993
- Journal of Non-Crystalline Solids
Electron paramagnetic resonance investigation of charge trapping centers in amorphous silicon nitride films
- W.L. Warren
- Jerzy Kanicki
- et al.
- 1993
- Journal of Applied Physics
Si and N dangling bond creation in silicon nitride thin films
- W.L. Warren
- J. Robertson
- et al.
- 1993
- Applied Physics Letters
Charge trapping centers in N-rich silicon nitride thin films
- W.L. Warren
- Jerzy Kanicki
- et al.
- 1992
- Applied Physics Letters
Electrically neutral nitrogen dangling-bond defects in amorphous hydrogenated silicon nitride thin films
- W.L. Warren
- P. Lenahan
- et al.
- 1991
- Journal of Applied Physics
Low-temperature electron spin resonance investigations of silicon paramagnetic defects in silicon nitride
- W.L. Warren
- F.C. Rong
- et al.
- 1991
- Applied Physics Letters
Energy level of the nitrogen dangling bond in amorphous silicon nitride
- W.L. Warren
- Jerzy Kanicki
- et al.
- 1991
- Applied Physics Letters