Energy level of the nitrogen dangling bond in amorphous silicon nitride
- W.L. Warren
- Jerzy Kanicki
- et al.
- 1991
- Applied Physics Letters
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Microscopic origin of the light-induced defects in hydrogenated nitrogen-rich amorphous silicon nitride films
- Jerzy Kanicki
- W.L. Warren
- et al.
- 1991
- Journal of Non-Crystalline Solids
Neutral E' centers in microwave downstream plasma-enhanced chemical-vapor-deposited silicon dioxide
- W.L. Warren
- P. Lenahan
- et al.
- 1988
- Applied Physics Letters