Structural identification of the silicon and nitrogen dangling-bond centers in amorphous silicon nitride
- William L. Warren
- F. Christopher Rong
- et al.
- 1991
- Journal of Applied Physics
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13 results for W.L. Warren
Microscopic origin of the light-induced defects in hydrogenated nitrogen-rich amorphous silicon nitride films
- Jerzy Kanicki
- W.L. Warren
- et al.
- 1991
- Journal of Non-Crystalline Solids
Neutral E' centers in microwave downstream plasma-enhanced chemical-vapor-deposited silicon dioxide
- W.L. Warren
- P. Lenahan
- et al.
- 1988
- Applied Physics Letters