Studies of the relationship between megasonics, surface etching, and particle removal in SC-1 solutions
- S.L. Cohen
- D.L. Rath
- et al.
- 1995
- MRS Spring Meeting 1995
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
9 results for S.L. Cohen
Preparation of hydrogen passivated silicon for UHV-CVD low temperature epitaxy
- S.L. Cohen
- 1993
- MRS Spring Meeting 1993
Surface analysis studies of copper chemical vapor deposition from 1,5-cyclooctadiene-copper(l)-hexafluoroacetylacetonate
- Susan L. Cohen
- Michael Liehr
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
MnFe and NiFe Thin Films and Magnetic Exchange Bilayers
- Michael A. Russak
- S.M. Rossnagel
- et al.
- 2019
- JES
Selectivity in copper chemical vapor deposition
- Susan L. Cohen
- Michael Liehr
- et al.
- 1992
- Applied Physics Letters
Mechanisms of copper chemical vapor deposition
- Susan L. Cohen
- Michael Liehr
- et al.
- 1992
- Applied Physics Letters
Chemistry of fluorine in the oxidation of silicon
- S.R. Kasi
- M. Liehr
- et al.
- 1991
- Applied Physics Letters
X-ray photoelectron spectroscopy and ellipsometry studies of the electrochemically controlled adsorption of benzotriazole on copper surfaces
- S.L. Cohen
- V. Brusic
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Characterization of the surface oxidation and magnetic properties of MnFe thin films
- S.L. Cohen
- Michael A. Russak
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films