Characterization of thin dielectric films as copper diffusion barriers using triangular voltage sweep
- S. Cohen
- J.C. Liu
- et al.
- 1999
- MRS Spring Meeting 1999
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15 results for Joyce C. Liu
Integration issues for diamond like carbon in a copper damascene process flow
- A. Grill
- C.V. Jahnes
- et al.
- 1998
- MRS Spring Meeting 1998
Characterization of thin dielectric films as copper diffusion barriers using triangular voltage sweep
- S. Cohen
- J.C. Liu
- et al.
- 1999
- MRS Spring Meeting 1999
Layered growth of the quasicrystalline decagonal Al3Pd phase in Al/Pd lateral diffusion couples
- B. Blanpain
- J.W. Mayer
- et al.
- 1990
- Physical Review Letters
Ion beam deposited diamond-like films: Synthesis, properties and applications
- J.J. Cuomo
- J. Doyle
- et al.
- 1990
- Carbon
Use of simulations of 15N profiling in studying hydrogen segregation at interfaces
- A.D. Marwick
- Joyce C. Liu
- et al.
- 1992
- Nuclear Inst. and Methods in Physics Research, B
Hydrogen redistribution and gettering in AlCu/Ti thin films
- A.D. Marwick
- Joyce C. Liu
- et al.
- 1991
- Journal of Applied Physics
Sputter deposition of dense diamond-like carbon films at low temperature
- Jerome J. Cuomo
- James P. Doyle
- et al.
- 1991
- Applied Physics Letters
Hydrogen segregation and trapping in the Al/Si(111) interface
- Joyce C. Liu
- A.D. Marwick
- et al.
- 1991
- Physical Review B
Ion-beam sputtered diamond-like carbon with densities of 2.9 g/cc
- Jerome J. Cuomo
- John Bruley
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films