Horizontally redundant, split-gate a-Si:H thin film transistors
- Yue Kuo
- 1996
- JES
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46 results for Yue Kuo
Single-gate multichannel amorphous silicon thin-film transistors
- Yue Kuo
- 1995
- Applied Physics Letters
On the effect of bonded hydrogen in the local microstructure of PECVD SiNx:H films
- E.C. Paloura
- Y. Kuo
- et al.
- 1995
- Physica B: Physics of Condensed Matter
Thin-film transistors with multistep deposited amorphous silicon layers
- Yue Kuo
- 1995
- Applied Physics Letters
PECVD Silicon Nitride as a Gate Dielectric for Amorphous Silicon Thin Film Transistor Process and Device Performance
- Yue Kuo
- 1995
- JES
Plasma Etching and Deposition for a-Si: H Thin Film Transistors
- Yue Kuo
- 1995
- JES
Thin Film Transistors with Graded SiNx Gate Dielectrics
- Yue Kuo
- 1994
- JES
Etch mechanism in the low refractive index silicon nitride plasma-enhanced chemical vapor deposition process
- Yue Kuo
- 1993
- Applied Physics Letters
Reactive ion etching of sputter deposited tantalum with Cf4, Cf3Cl, and CHF3
- Yue Kuo
- 1993
- Japanese Journal of Applied Physics
Plasma swelling of photoresist
- Yue Kuo
- 1993
- Japanese Journal of Applied Physics