Publications

3 results for D.V. Podlesnik

Formation of stoichiometric SiGe oxide by electron cyclotron resonance plasma
- - P.W. Li
  - H.K. Liou
  - et al.
- 1992
- Applied Physics Letters
GaAs-oxide removal using an electron cyclotron resonance hydrogen plasma
- - Z. Lu
  - M.T. Schmidt
  - et al.
- 1991
- Applied Physics Letters
Gaas surface oxidation and deoxidation using electron cyclotron resonance oxygen and hydrogen plasmas
- - D.V. Podlesnik
  - M.T. Schmidt
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films