Formation of stoichiometric SiGe oxide by electron cyclotron resonance plasma
- P.W. Li
- H.K. Liou
- et al.
- 1992
- Applied Physics Letters
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3 results for D.V. Podlesnik
GaAs-oxide removal using an electron cyclotron resonance hydrogen plasma
- Z. Lu
- M.T. Schmidt
- et al.
- 1991
- Applied Physics Letters
Gaas surface oxidation and deoxidation using electron cyclotron resonance oxygen and hydrogen plasmas
- D.V. Podlesnik
- M.T. Schmidt
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films