High conductivity gate metallurgy for TFT/LCD'sP.M. FryerE.G. Colganet al.1998MRS Spring Meeting 1998
High conductivity gate metallurgy for TFT/LCD'sP.M. FryerE.G. Colganet al.1998MRS Spring Meeting 1998
A six-mask TFT-LCD process using copper-gate metallurgyP.M. FryerE.G. Colganet al.1997Journal of the Society for Information Display