Sub-10 Nanometer Feature Size in Silicon Using Thermal Scanning Probe Lithography
- Yu Kyoung Ryu
- Colin D. Rawlings
- et al.
- 2017
- ACS Nano
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.