Interaction of SiC thermal oxidation by-products with SiO2
- C. Radtke
- F.C. Stedile
- et al.
- 2008
- Applied Physics Letters
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6 results for C. Krug
Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
- R.P. Pezzi
- C. Krug
- et al.
- 2008
- Applied Physics Letters
Advanced ion energy loss models: Applications to subnanometric resolution elemental depth profiling
- R.P. Pezzi
- P.L. Grande
- et al.
- 2007
- Surface Science
Atomic transport and integrity of Al2O3(2.0 nm)/HfO2(2.5 nm) gate stacks on Si
- L. Miotti
- R.P. Pezzi
- et al.
- 2007
- Applied Physics Letters
Transport and exchange of hydrogen isotopes in silicon-device-related stacks
- C. Krug
- E. Gusev
- et al.
- 2004
- Journal of Applied Physics
High-resolution depth profiling in ultrathin Al2O3 films on Si
- E. Gusev
- M. Copel
- et al.
- 2000
- Applied Physics Letters