EELS analysis of hydrogenated diamond-like carbon films
- L. Ponsonnet
- C. Donnet
- et al.
- 1998
- Thin Solid Films
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155 results for Alfred Grill
Integration issues for diamond like carbon in a copper damascene process flow
- A. Grill
- C.V. Jahnes
- et al.
- 1998
- MRS Spring Meeting 1998
Noble metal suicide formation in metal/Si structures during oxygen annealing: Implications for perovskite-based memory devices
- K.L. Saenger
- A. Grill
- et al.
- 1998
- Journal of Materials Research
Growth of bismuth titanate films by chemical vapor deposition and chemical solution deposition
- Deborah A. Neumayer
- Peter R. Buncombe
- et al.
- 1998
- Integrated Ferroelectrics
The respective role of oxygen and water vapor on the tribology of hydrogenated diamond-like carbon coatings
- C. Donnet
- T. Le Mogne
- et al.
- 1998
- Tribology Letters
Novel low k dielectrics based on diamondlike carbon materials
- A. Grill
- V.V. Patel
- et al.
- 1998
- JES
Oxygen-induced inhibition of noble metal silicide formation: implications for electrode/barrier structures used with perovskite materials
- K.L. Saenger
- A. Grill
- et al.
- 1997
- MRS Fall Meeting 1997
Diamond-like carbon coatings for vacuum and space tribology
- C. Donnet
- T. Le Mogne
- et al.
- 1997
- ESA SP
Effect of base electrode on the crystallization and electrical properties of PLT
- A. Grill
- R.B. Laibowitz
- et al.
- 1997
- Integrated Ferroelectrics
Friction control of diamond-like carbon coatings
- C. Donnet
- A. Grill
- 1997
- Surface and Coatings Technology