Integration and optimization of embedded-SiGe, compressive and tensile stressed liner films, and stress memorization in advanced SOI CMOS technologies
- M. Horstmann
- A. Wei
- et al.
- 2005
- IEDM 2005
Publications
Date
Featured collections
Popular topics
3 results for W. Lee
Preparation of 200 mm silicon substrates with metal ground-plane for double-gate SOI devices
- L.J. Huang
- K.K. Chan
- et al.
- 2000
- IEEE International SOI Conference 2000
Interface studies of tungsten gate metal-oxide-silicon capacitors
- Huiling Shang
- Marvin H. White
- et al.
- 2001
- Applied Physics Letters