Observation of columnar microstructure in step-graded Si1-xGex/Si films using high-resolution X-ray microdiffraction
- D.E. Eastman
- C.B. Stagarescu
- et al.
- 2002
- Physical Review Letters
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5 results for Guangyong Xu
Observation of Columnar Microstructure in Step-Graded [Formula presented] Films Using High-Resolution X-Ray Microdiffraction
- D.E. Eastman
- C.B. Stagarescu
- et al.
- 2002
- Physical Review Letters
Nanometer precision metrology of submicron Cu/SiO2 interconnects using fluorescence and transmission x-ray microscopy
- Guangyong Xu
- D.E. Eastman
- et al.
- 2003
- Journal of Applied Physics
Quantitative metrology study of Cu/SiO2 interconnect structures using fluorescence x-ray microscopy
- Guangyong Xu
- X. Su
- et al.
- 2001
- Applied Physics Letters
Quantitative nanoscale metrology study of Cu/SiO2 interconnect technology using transmission x-ray microscopy
- X. Su
- C.B. Stagarescu
- et al.
- 2000
- Applied Physics Letters