Characterization of spin -on glasses by microindentation
- E. Simonyi
- K.-W. Lee
- et al.
- 1998
- MRS Spring Meeting 1998
Publications
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129 results for Eric G. Liniger
Properties development during curing of low dielectric-constant spin-on glasses
- R.F. Cook
- E. Liniger
- et al.
- 1998
- MRS Spring Meeting 1998
Toughened, inorganic-organic hybrid materials for microelectronic application
- J.L. Hedrick
- S.A. Srinivasan
- et al.
- 1996
- MRS Fall Meeting 1996
Local and global stress distributions in BEOL metallization
- I.C. Noyan
- E. Liniger
- et al.
- 1996
- MRS Spring Meeting 1996
Porous organosilicates for on-chip dielectric applications
- R.D. Miller
- R. Beyers
- et al.
- 1999
- MRS Spring Meeting 1999
Random loose packings of uniform spheres and the dilatancy onset
- George Y. Onoda
- Eric G. Liniger
- 1990
- Physical Review Letters
Novel low k Dielectric materials for nano device interconnect technology
- Son Van Nguyen
- Hosadurga Shobha
- et al.
- 2020
- VLSI-TSA 2020
Reliable airgap BEOL technology in advanced 48 nm pitch copper/ULK interconnects for substantial power and performance benefits
- C. J. Penny
- S. Gates
- et al.
- 2017
- IITC 2017
Low hydrogen silicon carbon nitride cap for high performance sub-10 nm Cu-low k interconnect
- Son Van Nguyen
- Shobha Hosadugra
- et al.
- 2017
- ECS Meeting 2017 - New Orleans
Effect of H2O on TDDB for a range of ULK ILD materials with varying damage resistance for robust and weak liners
- Eric G. Liniger
- Robert B. Laibowitz
- et al.
- 2016
- IRPS 2016