Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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34 results for Oleg Gluschenkov

Thermally robust dual-work function ALD-MN _x MOSFETs using conventional CMOS process flow
- - D.-G. Park
  - Z. Luo
  - et al.
- 2004
- VLSI Technology 2004
Crystallization of hafnium-oxide-based ferroelectrics for BEOL integration
- - Martin M. Frank
  - Eduard A. Cartier
  - et al.
- 2022
- EDTM 2022
Impact of nanosecond laser annealing on vacancies in electroplated Cu films studied by monoenergetic positron beams
- - Akira Uedono
  - Takeshi Nogami
  - et al.
- 2023
- Journal of Applied Physics
Characterization of wafer geometry and overlay error on silicon wafers with nonuniform stress
- - Timothy A. Brunner
  - Vinayan C. Menon
  - et al.
- 2013
- Journal of Micro/Nanolithography, MEMS, and MOEMS