Acid generation efficiency: EUV photons versus photoelectrons
- Dario Goldfarb
- Ali Afzali-Ardakani
- et al.
- 2016
- SPIE Advanced Lithography 2016
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69 results for Dario Goldfarb
Through-pellicle defect inspection of EUV masks using an ArF-based inspection tool
- Dario Goldfarb
- William Broadbent
- et al.
- 2016
- SPIE Advanced Lithography 2016
Fabrication of a full-size EUV pellicle based on silicon nitride
- Dario Goldfarb
- 2015
- SPIE Photomask Technology + EUV Lithography 2015
ICE: Ionic contrast enhancement for organic solvent negative tone develop
- Linda K. Sundberg
- Gregory M. Wallraff
- et al.
- 2014
- SPIE Advanced Lithography 2014
Pattern collapse mitigation strategies for EUV Lithography
- Dario L. Goldfarb
- Robert L. Bruce
- et al.
- 2012
- SPIE Advanced Lithography 2012
Bridging CD metrology gaps of advanced patterning with assistance of nanomolding
- Narender Rana
- Dario Goldfarb
- 2012
- SPIE Advanced Lithography 2012
Electrochemical protection of thin film electrodes in solid state nanopores
- Stefan Harrer
- Philip S. Waggoner
- et al.
- 2011
- Nanotechnology
Revisit pattern collapse for 14nm node and beyond
- Kenji Yoshimoto
- Craig Higgins
- et al.
- 2011
- SPIE Advanced Lithography 2011
Fundamental investigation of Negative Tone Development (NTD) for the 22nm node (and beyond)
- Guillaume Landie
- Yongan Xu
- et al.
- 2011
- SPIE Advanced Lithography 2011
Electrochemical characterization of thin film electrodes toward developing a DNA transistor
- Stefan Harrer
- Shafaat Ahmed
- et al.
- 2010
- Langmuir