Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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90 results for Martin M Frank

High temperature (1000°C) compatible Y-La-Si-O silicate gate dielectric in direct contact with Si with 7.7 Å equivalent oxide thickness
- - Catherine Dubourdieu
  - E. Cartier
  - et al.
- 2011
- Applied Physics Letters
Epitaxial SrO interfacial layers for HfO₂ -Si gate stack scaling
- - Chiara Marchiori
  - Martin M. Frank
  - et al.
- 2011
- Applied Physics Letters
Domain dynamics in epitaxial Pb (Zr_0.2Ti_0.8)O ₃ films studied by piezoelectric force microscopy
- - Levente J. Klein
  - Catherine Dubourdieu
  - et al.
- 2010
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Physical origins of mobility degradation in extremely scaled SiO ₂ / HfO₂ gate stacks with la and Al induced dipoles
- - Takashi Ando
  - Matt Copel
  - et al.
- 2010
- Applied Physics Letters
Oxygen migration in TiO₂-based higher-k gate stacks
- - Sangbum Kim
  - Stephen L. Brown
  - et al.
- 2010
- Journal of Applied Physics
Scaling the MOSFET gate dielectric: From high-k to higher-k? (Invited Paper)
- - Martin M. Frank
  - SangBum Kim
  - et al.
- 2009
- Microelectronic Engineering
Quasi-damascene metal gate/high-k CMOS using oxygenation through gate electrodes
- - Changhwan Choi
  - Takashi Ando
  - et al.
- 2009
- Microelectronic Engineering
The relationship between local order, long range order, and sub-band-gap defects in hafnium oxide and hafnium silicate films
- - D.H. Hill
  - R.A. Bartynski
  - et al.
- 2008
- Journal of Applied Physics
Chemical and structural modifications in a 193-nm photoresist after low-k dry etch
- - E. Kesters
  - M. Claes
  - et al.
- 2008
- Thin Solid Films
Impact of metal gates on remote phonon scattering in titanium nitride/hafnium dioxide n -channel metal-oxide-semiconductor field effect transistors-low temperature electron mobility study
- - Kingsuk Maitra
  - Martin M. Frank
  - et al.
- 2007
- Journal of Applied Physics