Texture formation in Ti-Ta alloy disilicide thin films
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2002
- Journal of Applied Physics
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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193 results for Christian Lavoie
Nucleation and growth kinetics of preferred C54 TiSi 2 orientations: Time-resolved x-ray diffraction measurements
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2002
- Journal of Applied Physics
Texture of TiSi 2 thin films on Si (001)
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2002
- Journal of Applied Physics
Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition
- H. Kim
- C. Cabral
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Metastable and equilibrium phase formation in sputter-deposited Ti/Al multilayer thin films
- G.A. Lucadamo
- K. Barmak
- et al.
- 2002
- Journal of Applied Physics
Effects of alloying elements on cobalt silicide formation
- C. Lavoie
- C. Cabral Jr.
- et al.
- 2002
- Journal of Electronic Materials
Formation of c54 tisi2: Effects of niobium additions on the apparent activation energy
- F.M. D’Heurle
- S.-L. Zhang
- et al.
- 2001
- Journal of Applied Physics
The use of in situ X-ray diffraction, optical scattering and resistance analysis techniques for evaluation of copper diffusion barriers in blanket films and damascene structures
- C. Cabral Jr.
- C. Lavoie
- et al.
- 2001
- Thin Solid Films
Interfacial reaction pathways and kinetics during annealing of 111-textured Al/TiN bilayers: A synchrotron x-ray diffraction and transmission electron microscopy study
- J.-S. Chun
- P. Desjardins
- et al.
- 2001
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Interfacial reaction pathways and kinetics during annealing of epitaxial Al/TiN(001) model diffusion barrier systems
- J.-S. Chun
- P. Desjardins
- et al.
- 2001
- Thin Solid Films