In situ slider-to-disk spacing on a nanometer scale controlled by microheater-induced slider deformations
- A. Dietzel
- R. Berger
- et al.
- 2002
- Sensors and Actuators, A: Physical
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50 results for Walter Haeberle
Compact copper/epoxy-based electromagnetic scanner for scanning probe applications
- H. Rothuizen
- M. Despont
- et al.
- 2002
- MEMS 2002
Integrated microheaters for in-situ flying-height control of sliders used in hard-disk drives
- P. Mächtle
- R. Berger
- et al.
- 2001
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Millipede - A highly-parallel dense scanning-probe-based data-storage system
- M.I. Lutwyche
- G. Cross
- et al.
- 2000
- ISSCC 2000
Highly parallel data storage system based on scanning probe arrays
- M.I. Lutwyche
- M. Despont
- et al.
- 2000
- Applied Physics Letters
The "Millipede" - More than one thousand tips for parallel and dense AFM data storage
- P. Vettiger
- G. Gross
- et al.
- 2000
- APMRC 2000
VLSI-NEMS chip for parallel AFM data storage
- M. Despont
- J. Brugger
- et al.
- 2000
- Sensors and Actuators, A: Physical
Dual-cantilever AFM probe for combining fast and coarse imaging with high-resolution imaging
- M. Despont
- H. Takahashi
- et al.
- 2000
- MEMS 2000
"Millipede" - An AFM data storage system at the frontier of nanotribology
- U. Dürig
- G. Cross
- et al.
- 2000
- Tribology Letters
Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications
- H. Rothuizen
- U. Drechsler
- et al.
- 2000
- Microelectronic Engineering