Low-k spacers for advanced low power CMOS devices with reduced parasitic capacitances
- Elbert Huang
- Eric Joseph
- et al.
- 2008
- IEEE International SOI Conference 2008
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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49 results for E. Huang
A multilevel copper/low-k/airgap BEOL technology
- S.V. Nitta
- S. Ponoth
- et al.
- 2007
- ADMETA 2007
Porous ILD process development for sub 100nm integration
- K. Malone
- S.T. Chen
- et al.
- 2003
- ADMETA 2003
Characteristics of low-k and ultralow-k PECVD deposited SiCOH films
- A. Grill
- V.V. Patel
- et al.
- 2002
- MRS Proceedings 2002
Controlled interfacial interaction using grafted random copolymers
- T.P. Russell
- E. Huang
- et al.
- 1999
- American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Manipulation of surface properties using novel grafted copolymer brushes and surface initiated polymerization
- C.J. Hawker
- J.L. Hedrick
- et al.
- 1999
- American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Electromigration challenges for nanoscale Cu wiring
- C.-K. Hu
- L. Gignac
- et al.
- 2008
- International Workshop on Stress-Induced Phenomena in Metallization 2008
Merged-Element Transmons: Design and Qubit Performance
- H.J. Mamin
- E. Huang
- et al.
- 2021
- Physical Review Applied
Porous organosilicates low-dielectric films for high-frequency devices
- André Knoesen
- Ge Song
- et al.
- 2004
- Journal of Electronic Materials
Pore morphologies in disordered nanoporous thin films
- Jonathan A. Hedstrom
- Michael F. Toney
- et al.
- 2003
- Langmuir