Generic On-Line Discovery of Quantitative Models
- Lisa F. Spainhower
- Yixin Diao
- et al.
- 2004
- IEEE TNSM
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33 results for M. Surendra
Service Level Management: A Dynamic Discovery and Optimization Approach
- Yixin Diao
- Frank Eskesen
- et al.
- 2004
- IEEE TNSM
Etching processes and characteristics for the fabrication of refractory x-ray masks
- Michael J. Lercel
- Cameron J. Brooks
- et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Radiofrequency discharge benchmark model comparison
- M. Surendra
- 1995
- Plasma Sources Science and Technology
A Monte Carlo collision model for the particle-in-cell method: applications to argon and oxygen discharges
- V. Vahedi
- M. Surendra
- 1995
- Computer Physics Communications
Across wafer etch rate uniformity in a high density plasma reactor: Experiment and modeling
- M. Surendra
- C.R. Guarnieri
- et al.
- 1995
- Applied Physics Letters
Detection and modelling of electrode topography effects on particle traps
- M. Dalvie
- M. Surendra
- et al.
- 1994
- Plasma Sources Science and Technology
Collisionless electron heating by radio-frequency plasma sheaths
- M. Surendra
- D. Vender
- 1994
- Applied Physics Letters
Self-consistent fluid modeling of radio frequency discharges in two dimensions
- M. Dalvie
- M. Surendra
- et al.
- 1993
- Applied Physics Letters
Detection of particle traps by spatially resolved optical emission spectroscopy over grooved electrodes in radio frequency discharges
- M. Dalvie
- G.S. Selwyn
- et al.
- 1993
- Applied Physics Letters