Sub-10-nm nanochannels by self-sealing and self-limiting atomic layer deposition
- Sung-Wook Nam
- Min-Hyun Lee
- et al.
- 2010
- Nano Letters
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97 results for Stephen Rossnagel
Deposition of aluminum-doped zinc oxide thin films for optical applications using rf and dc magnetron sputter deposition
- Kousik Sivakumar
- S.M. Rossnagel
- 2010
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Oxygen migration in TiO2-based higher-k gate stacks
- Sangbum Kim
- Stephen L. Brown
- et al.
- 2010
- Journal of Applied Physics
Morphological stability and specific resistivity of sub-10 nm silicide films of Ni1-x Ptx on Si substrate
- Zhen Zhang
- Shi Li Zhang
- et al.
- 2010
- Applied Physics Letters
Atomic layer deposition of Ge2Sb2Te5 thin films
- Mikko Ritala
- Viljami Pore
- et al.
- 2009
- Microelectronic Engineering
Ionic field effect transistors with sub-10 nm multiple nanopores
- Sung-Wook Nam
- Michael J. Rooks
- et al.
- 2009
- Nano Letters
Plasma modeling of a PEALD system for the deposition of TiO 2 and HfO 2
- Junghoon Joo
- Steve M. Rossnagel
- 2009
- Journal of the Korean Physical Society
Metal-containing release layers for use with UV-cure nanoimprint lithographic template materials
- F.A. Houle
- S. Raoux
- et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Nanopore in metal-dielectric sandwich for DNA position control
- Stas Polonsky
- Steve Rossnagel
- et al.
- 2007
- Applied Physics Letters
Evidence for segregation of Te in Ge2 Sb2 Te5 films: Effect on the "phase-change" stress
- L. Krusin-Elbaum
- C. Cabral
- et al.
- 2007
- Applied Physics Letters