Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

Date

Start

End

Featured collections

Popular topics

97 results for Stephen Rossnagel

Sub-10-nm nanochannels by self-sealing and self-limiting atomic layer deposition
- - Sung-Wook Nam
  - Min-Hyun Lee
  - et al.
- 2010
- Nano Letters
Deposition of aluminum-doped zinc oxide thin films for optical applications using rf and dc magnetron sputter deposition
- - Kousik Sivakumar
  - S.M. Rossnagel
- 2010
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Oxygen migration in TiO₂-based higher-k gate stacks
- - Sangbum Kim
  - Stephen L. Brown
  - et al.
- 2010
- Journal of Applied Physics
Morphological stability and specific resistivity of sub-10 nm silicide films of _{Ni1-x Ptx} on Si substrate
- - Zhen Zhang
  - Shi Li Zhang
  - et al.
- 2010
- Applied Physics Letters
Atomic layer deposition of Ge₂Sb₂Te₅ thin films
- - Mikko Ritala
  - Viljami Pore
  - et al.
- 2009
- Microelectronic Engineering
Ionic field effect transistors with sub-10 nm multiple nanopores
- - Sung-Wook Nam
  - Michael J. Rooks
  - et al.
- 2009
- Nano Letters
Plasma modeling of a PEALD system for the deposition of TiO ₂ and HfO ₂
- - Junghoon Joo
  - Steve M. Rossnagel
- 2009
- Journal of the Korean Physical Society
Metal-containing release layers for use with UV-cure nanoimprint lithographic template materials
- - F.A. Houle
  - S. Raoux
  - et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Nanopore in metal-dielectric sandwich for DNA position control
- - Stas Polonsky
  - Steve Rossnagel
  - et al.
- 2007
- Applied Physics Letters
Evidence for segregation of Te in Ge2 Sb2 Te5 films: Effect on the "phase-change" stress
- - L. Krusin-Elbaum
  - C. Cabral
  - et al.
- 2007
- Applied Physics Letters