Publications

2 results for Balint Meliorisz

Advanced fast 3D DSA model development and calibration for design technology co-optimization
- - Kafai Lai
  - Balint Meliorisz
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Modeling and parameter tuning for templated directed self-Assembly
- - Balint Meliorisz
  - T. Mülders
  - et al.
- 2016
- SPIE Advanced Lithography 2016