Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication
- Colin D. Rawlings
- Michal Zientek
- et al.
- 2017
- Scientific Reports
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20 results for Juergen Brugger
VLSI-NEMS chip for AFM data storage
- M. Despont
- J. Brugger
- et al.
- 1999
- MEMS 1999
Nanomechanical nose
- H.P. Lang
- M.K. Baller
- et al.
- 1999
- MEMS 1999
Microfabrication and parallel operation of 5×5 2D AFM cantilever arrays for data storage and imaging
- M.I. Lutwyche
- C. Andreoli
- et al.
- 1998
- MEMS 1998
Fabrication of ultrasensitive piezoresistive cantilevers for torque magnetometry
- J. Brugger
- M. Willemin
- et al.
- 1997
- TRANSDUCERS 1997
High-yield wafer chuck for single-sided wet etching of MEMS structures
- J. Brugger
- G. Beljakovic
- et al.
- 1997
- TRANSDUCERS 1997
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications
- M. Despont
- H. Lorenz
- et al.
- 1997
- MEMS 1997
VLSI-NEMS chip for parallel AFM data storage
- M. Despont
- J. Brugger
- et al.
- 2000
- Sensors and Actuators, A: Physical
Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical systems devices
- J. Brugger
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
Parallel nanodevice fabrication using a combination of shadow mask and scanning probe methods
- Roli Lüthi
- Reto R. Schlittler
- et al.
- 1999
- Applied Physics Letters