Dielectric Charging in Electrostatically Actuated MEMS Ohmic Switches
- Zhen Peng
- Cristiano Palego
- et al.
- 2008
- IEEE T-DMR
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91 results for Christopher V. Jahnes
High-efficiency 60 GHz antenna fabricated using low-cost silicon micromachining techniques
- N. Hoivik
- D. Liu
- et al.
- 2007
- APS 2007
Evaluation of o2 plasma and xef2 vapor etch release processes for rf-mems switches fabricated using cmos interconnect technology
- Christopher V. Jahnes
- Nils Hoivik
- et al.
- 2006
- TRANSDUCERS 2006
Analysis and modeling of curvature in copper-based mems structures fabricated using CMOS interconnect technology
- Marie-Ange Eyoum
- Nils Hoivik
- et al.
- 2005
- TRANSDUCERS 2005
Improved DC and RF performance in Si/SiGe n-MODFETs with ion-implanted buried p-well doping
- S.J. Koester
- K.L. Saenger
- et al.
- 2005
- IEEE Electron Device Letters
Laterally scaled Si-Si0.7Ge0.3 n-MODFETs with fmax > 200 GHz and low operating bias
- S.J. Koester
- K.L. Saenger
- et al.
- 2005
- IEEE Electron Device Letters
Laterally-scaled Si/SiGe n-MODFETs with in situ and ion-implanted p-well doping
- S.J. Koester
- K.L. Saenger
- et al.
- 2004
- DRC 2004
SiGe MODFETS: Overview and issues for sub-100 nm gate-length scaling
- S.J. Koester
- K.L. Saenger
- et al.
- 2004
- ECS Meeting 2004
Simultaneous fabrication of RF MEMS switches and resonators using copper-based CMOS interconnect manufacturing methods
- C.V. Jahnes
- J.M. Cotte
- et al.
- 2004
- MEMS 2004
High-performance SiGe MODFET technology
- S.J. Koester
- J.O. Chu
- et al.
- 2004
- MRS Proceedings 2004