Evaluation of o2 plasma and xef2 vapor etch release processes for rf-mems switches fabricated using cmos interconnect technology
- Christopher V. Jahnes
- Nils Hoivik
- et al.
- 2006
- TRANSDUCERS 2006
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91 results for Christopher V. Jahnes
Pitting of Sputtered Aluminum Alloy Thin Films
- G.S. Frankel
- Michael A. Russak
- et al.
- 2019
- JES
MnFe and NiFe Thin Films and Magnetic Exchange Bilayers
- Michael A. Russak
- S.M. Rossnagel
- et al.
- 2019
- JES
In Situ X-Ray Absorption Study of Chromium Valency Changes in Passive Oxides on Sputtered ALCr Thin Films Under Electrochemical Control
- A.J. Davenport
- H.S. Isaacs
- et al.
- 2019
- JES
Repassivation transients measured with thin film breaking electrodes
- G.S. Frankel
- B. Rush
- et al.
- 2019
- JES
Pit Growth in Nife Thin Films
- B.M. Rush
- J. Dukovic
- et al.
- 2019
- JES
Corrosion and Passivation of Fe and FeN Films
- V. Brusic
- G.S. Frankel
- et al.
- 2019
- JES
X-Ray Absorption Study of Electrochemically Grown Oxide Films on Al-Cr Sputtered Alloys: I. Ex situ Studies
- A.J. Davenport
- H.S. Isaacs
- et al.
- 2019
- JES
Terabit/Sec VCSEL-based 48-channel optical module based on holey CMOS transceiver IC
- Fuad E. Doany
- Benjamin G. Lee
- et al.
- 2013
- Journal of Lightwave Technology
Demonstration of a digital CMOS driver codesigned and integrated with a broadband silicon photonic switch
- Benjamin G. Lee
- Clint L. Schow
- et al.
- 2011
- Journal of Lightwave Technology