Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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44 results for S. Molis

Impact of HF-based cleaning solutions on via resistance for sub-10 nm BEOL structures
- - B. Peethala
  - F. Mont
  - et al.
- 2016
- Microelectronic Engineering
Post copper CMP hybrid clean process for advanced BEOL technology
- - Wei-Tsu Tseng
  - Vamsi Devarapalli
  - et al.
- 2013
- IEEE Trans Semicond Manuf
Effective Cu surface pre-treatment for high-reliable 22 nm-node Cu dual damascene interconnects with high plasma resistant ultra low-k dielectric (k = 2.2)
- - F. Ito
  - H. Shobha
  - et al.
- 2012
- Microelectronic Engineering
Competitive and cost effective copper/low-k interconnect (BEOL) for 28 nm CMOS technologies
- - R. Augur
  - C. Child
  - et al.
- 2012
- Microelectronic Engineering
Physical characterization of sub-32-nm semiconductor materials and processes using advanced ion beam-based analytical techniques
- - M. Hopstaken
  - D. Pfeiffer
  - et al.
- 2012
- Surface and Interface Analysis
Silane decomposition on Cu interconnects inhibited by ammonia
- - E. Todd Ryan
  - Steven Molis
  - et al.
- 2010
- JES
Property modifications of nanoporous pSiCOH dielectrics to enhance resistance to plasma-induced damage
- - E. Todd Ryan
  - Stephen M. Gates
  - et al.
- 2008
- Journal of Applied Physics
Interface engineering for high interfacial strength between SiCOH and porous SiCOH interconnect dielectrics and diffusion caps
- - A. Grill
  - D. Edelstein
  - et al.
- 2008
- Journal of Applied Physics
Line resistance and electromigration variations induced by hydrogen-based plasma modifications to the silicon carbonitride/copper interface
- - E. Todd Ryan
  - Jeremy Martin
  - et al.
- 2007
- JES
Measurement of Stresses Using Fluorescence in an Optical Microprobe: Stresses around Indentations in a Chromium‐Doped Sapphire
- - Steven E. Molis
  - David R. Clarke
- 2005
- JACerS